Samir Nayfeh

Samir Nayfeh is Chief Scientist for Top Flight Technologies. From 1998 to 2006, he served as Assistant and then Associate Professor of Mechanical Engineering at MIT. From 2006 to 2016, he developed precision electromechanical systems for a variety of customers as part of Equilibria Design Group.

Patents and Patent Applications Pending
Papers in Refereed Journals
Papers in Refereed Conference Proceedings
Other Major Publications
Invited Lectures
Doctoral Theses Supervised
Master’s Theses Supervised

Patents and Patent Applications Pending

1. Maue, H. W., Krupp, E. J., Maass., M N., Sims, J. R., Nayfeh, S. A., Raade, J. W., Cai, A.W., Faiz, J. S., Montoya, M., Rios, E., Tribin, P., Blanco, E., “Single motor module for a vehicle seat,” US Patent number 6,626,064, 2003.
2. Bryn, L., Nayfeh, S. A., Islam, M., Lowery Jr., W. L., and Harries H. D., “Loom andMethod of Weaving Three-Dimensional Woven Forms with Integral Bias Fibers,” US Patent number 6,892,766, May 2005.
3. Nayfeh, S. A., Rohrs, J., Diaz, M., Rifai, O., Warman, E., “Bias Weaving Machine,” USPatent number 7,077,167, 2004.
4. Rohrs, J. and Nayfeh, S. A., “Modular Weaving for Short Production Runs,” US Patentnumber 7,178,558, 2006.
5. Nayfeh, S. A., and Rohrs, J., “Modular Weaving System with Individual Yarn Control,” USPatent number 7,318,456, 2008.
6. Dibiaso, C., Durand, K., Hopkins, J., Traina, Z., Slocum, A., Nayfeh, S., del Nido, P., andVailiev, N., “Instrument Port for Minimally Invasive Cardiac Surgery,” US Patent number 8,394,015, 2007.
7. Moro, R. A., Howard, M., Nayfeh, S. A., Klotzle, C. S., Young, J. A., “Rotating ElectricalTransfer Components,” US Patent number 7,549,867, June 2009.
8. Lee,W. D., Lafontaine, M. R., Purohit, A. M., Gillsepie, J. D., Beckel, D., Tao, T. C.,Slocum, A. H., Nayfeh, S. A., “Gas Bearing Electrostatic Chuck,” US Patent Application 20090273878.
9. Farnsworth, W. L., Del Puerto, S. E., Nayfeh, S. A., “Lithographic Apparatus, ProjectionSystem and Damper for Use in a Lithographic Apparatus and Device Manufacturing Method,” US Patent number 8,625,070, January 2014 .
10. Nayfeh, S. A., Williams, M. E., and Verdirame, J. M., “Shear Layer Chuck for LithographicApparatus,” US Patent Application 2009124732.
11. Ummethala, U., Hale, L. C., Clyne, J., Nayfeh, S. A., Williams, M. E., Di Regolo, J. A.,Wilson, A. K., “Linear Stage for Reflective Electron Beam Lithography,” US Patent Application 20130293865.
12. Ummethala, U., Hale, L. C., Clyne, J., Nayfeh, S. A., Williams, M. E., Di Regolo, J. A.,“Linear Stage and Metrology Architecture for Reflective Electron Beam Lithography,” US Patent Application 20130342827.
13. Subramanyam, P. K., Williams M. E., and Nayfeh, S. A., “Arrangement of a ReticlePositioning Device for Actinic Inspection of EUV Reticles,” US Patent Application 20130264494.
14. Smith, E, Takata, R., Slocum, A., and Nayfeh, S. A., “Tapered Structure Construction,” USPatent number 9,302,303 B2.
15. Nayfeh, S. A., “Reticle Cooling in a Lithographic Apparatus,” US Patent Application20120026474.
16. Ebert, E., Onvlee, J., Nayfeh, S. A., et al, “Patterning Device Support, Lithographic Apparatus, and Method of Controlling Patterning Device Temperature,” Patent Application WO 2014067802 A1.
17. Westerlaken, J., Bloks, R., DelMastro, P., Nayfeh, S. A., et al, “A Lithographic Apparatus,” Patent Application WO 2014005780.

Papers in Refereed Journals

1. Nayfeh, S. A. and Nayfeh, A. H., “Nonlinear Interactions Between Two Widely SpacedModes—External Excitation,” International Journal of Bifurcation and Chaos 3, No. 2, pp. 417–427, 1993.
2. Nayfeh, S. A. and Nayfeh, A. H., 1994, “Energy Transfer from High- to Low-FrequencyModes in a Flexible Structure,” Journal of Vibration and Acoustics 116, No. 2, pp. 203–207, 1994.
3. Nayfeh, A. H. and Nayfeh, S. A., “On Nonlinear Modes of Continuous Systems,” Journal of Vibration and Acoustics 116, No. 1, pp. 129–136, 1994.
4. Nayfeh, A. H. and Nayfeh, S. A., “Nonlinear Normal Modes of a Continuous System withQuadratic Nonlinearities,” Journal of Vibration and Acoustics 117, No. 2, pp. 199–205, 1994.
5. Nayfeh, A. H., Chin, C., and Nayfeh, S. A., “Nonlinear Normal Modes of a CantileverBeam,” Journal of Vibration and Acoustics 117, No. 4, pp. 477–481, 1995.
6. Pakdemirli, M., Nayfeh, S. A., and Nayfeh, A. H., “Analysis of One-to-One AutoparametricResonances in Cables—Discretization vs. Direct Treatment,” Nonlinear Dynamics 8, pp. 65–83, 1995.
7. Nayfeh, S. A., Nayfeh, A. H., and Mook, D. T., “Nonlinear Response of a Taut String toParametric and External Excitation,” Journal of Vibration and Control 1, pp. 307–334, 1995.
8. Nayfeh, A. H., Chin, C., and Nayfeh, S. A., “On Nonlinear Normal Modes of Systems withInternal Resonance,” Journal of Vibration and Acoustics 118, pp. 340–345, 1996.
9. Al–Nahwi, A. A., Pauduano, J. D., and Nayfeh, S. A., “Aerodynamic-RotordynamicInteraction in Axial Compression Systems—Part I: Modeling and Analysis of Fluid-Induced Forces,” ASME Journal of Turbomachinery 125, pp. 405–415, 2003.
10. Al–Nahwi, A. A., Pauduano, J. D., and Nayfeh, S. A., “Aerodynamic-RotordynamicInteraction in Axial Compression Systems—Part II: Impact on Overall System Stability,” ASME Journal of Turbomachinery 125, pp. 416–424, 2003.
11. Zuo, L. and Nayfeh, S. A., “Low-Order Continuous-Time Filters for Approximation of theISO 2631 Human Vibration Sensitivity Curves,” Journal of Sound and Vibration 265, pp. 459–465, 2003.
12. Zuo, L. and Nayfeh, S. A., “Structured H2 Optimization of Vehicle Suspensions Based onMulti-Wheel Models,” Vehicle System Dynamics 40, pp. 351–371, 2003.
13. Zuo, L. and Nayfeh, S. A., “Minimax Optimization of Multi-Degree-of-Freedom Tuned-MassDampers,” Journal of Sound and Vibration 272, pp. 893–908, 2004.
14. Varanasi, K. K. and Nayfeh, S. A., “Dynamics of Leadscrew Drives: Low-Order Modelingand Experiments,” Journal of Dynamic Systems, Measurement, and Control 126, pp. 388-396, 2004.
15. Nayfeh, S. A., “Damping of Flexural Vibration in the Plane of Lamination ofElastic-Viscoelastic Sandwich Beams” Journal of Sound and Vibration 276, pp. 689–711, 2004.
16. Abbot, R., Adhikari, R., Allen, G., Bagline, D., Cambpbell, C., Coyne, D., Daw, E., DeBra,
D., Faludi, J., Fritschel, P., Ganguli, A., Giaime, J., Hammond, M., Hardham, C., Harry, G., Hua, W., Jones, L., Kern, J., Lantz, B., Lilienkamp, K., Mailand, K., Mason, K.,
Mittleman, R., Nayfeh, S., Ottaway, D., Phinney, J., Rankin, W., Robertson, N., Scheffler, R., Shoemaker, D. H., Wen, S., Zucker, M., and Zuo, L., “Seismic Isolation Enhancements for Initial and Advanced LIGO,” Classical and Quantum Gravity 21, pp. 915–921, 2004.
17. Nayfeh, S. A. and Varanasi, K. K., “A Model for the Damping of Torsional Vibration ofThin-Walled Tubes With Constrained Viscoelastic Layers,” Journal of Sound and Vibration 278, pp. 825–846, 2004.
18. Zuo, L. and Nayfeh, S. A., “Optimization of the Individual Stiffness and DampingParameters of Multiple-Tuned-Mass-Damper Systems,” Journal of Vibration and Acoustics 127, pp. 77–83, 2005.
19. Zuo, L., Slotine, J-J. S., and Nayfeh, S. A., “Model-Reaching Adaptive Control forVibration Isolation,” IEEE Journal of Control Systems Technology 13, 2005.
20. Zuo, L. and Nayfeh, S. A., “The Two-Degree-of-Freedom Tuned-Mass Damper forSuppression of Single-Mode Vibration Under Random and Harmonic Excitation,” Journal of Vibration and Acoustics 128, pp. 56–65, 2006.
21. Varanasi, K. K. and Nayfeh, S. A., “Damping of Flexural Vibration Using Low-Density,Low-Wave-Speed Media,” Journal of Sound and Vibration 292, pp. .402–414, 2006.
22. Zuo, L. and Nayfeh, S. A., “H2 Optimal Control of Disturbance-Delayed Systems withApplication to Vehicle Suspensions,” Vehicle System Dynamics 45, p. 233, 2007.
23. Zuo, L., Chen, X., and Nayfeh, S. A., “A New Type of Eddy Current Damper withIncreased Energy Density,” Journal of Vibration and Acoustics, in print.

Proceedings of Refereed Conferences

1. Nayfeh, S. A., and Nayfeh, A. H., “The Response of Nonlinear Systems to Modulated
High-Frequency Input,” Dynamics and Vibration of Time-Varying Systems and Structures, ASME 14th Biennial Conference on Mechanical Vibration and Noise, Albuquerque, New Mexico, 1993.
2. Nayfeh, S. A., and Asada, H., “Orthogonal Sets of Design Changes for Torsional VibrationProblems,” Symposium on the Vibration of Continuous Systems, ASME 15th Biennial Conference on Vibration and Noise, Boston, Massachusetts, 1995.
3. Scagnetti, P., Marsh, E., Slocum, A., and Nayfeh, S., “A New Method for ImprovingDynamic Stiffness of Advanced Ceramic Structures,” American Society for Precision Engineering 11th Annual Meeting, Austin, Texas, 1996.
4. Nayfeh, S. A., and Slocum, A. H., “Flexural Vibration of a Viscoelastic Sandwich Beam inits Plane of Lamination,” Symposium on the Vibration of Continuous Systems, ASME 16th Biennial Conference on Vibration and Noise, Sacramento, California, 1997.
5. Nayfeh, S. A., and Slocum, A. H., “Enhancing Ballscrew Axial Dynamics,” American Society for Precision Engineering 13th Annual Meeting, St. Louis, Missouri, 1998.
6. Devitt, D., Nayfeh, S. A., and Varanasi, K. K., “Dynamic Stiffness of Porous Air bearingsand Force-Balanced Bearing,” American Society for Precision Engineering 14th Annual Meeting, Monterey, California, 1999.
7. Nayfeh, S. A., Varanasi, K., “Design of Leadscrew Drives for Dynamic Performance,”American Society for Precision Engineering 16th Annual Conference, Crystal City, Virginia, 2001.
8. Nayfeh, S. A., “Constrained-Layer Damping of Torsional Vibration of Thin-Walled Tubes,”ASME 18th Biennial Conference on Vibration and Noise, Pittsburgh, Pennsylvania, 2001.
9. Zuo, L. and Nayfeh, S. A., “Design of Multi-Degree-of-Freedom Tuned-Mass Dampers: aMinimax Approach,” 43rd AIAA Structures, Structural Dynamics, and Materials Conference, Denver, Colorado, 2002.
10. Zuo, L. and Nayfeh, S. A., “Design of Passive Mechanical Systems via Decentralized ControlTechniques,” 43rd AIAA Structures, Structural Dynamics, and Materials Conference, Denver, Colorado, 2002.
11. Al–Nahwi, A. A., Pauduano, J. D., and Nayfeh, S. A., “Aerodynamic-RotordynamicInteraction in Axial Compression Systems—Part I: Modeling and Analysis of Fluid-Induced Forces,” ASME/IGTI Turbo Expo 2002, Amsterdam, The Netherlands, 2002.
12. Al–Nahwi, A. A., Pauduano, J. D., and Nayfeh, S. A., “Aerodynamic-RotordynamicInteraction in Axial Compression Systems—Part II: Impact on Overall System Stability,” ASME/IGTI Turbo Expo 2002, Amsterdam, The Netherlands, 2002.
13. Zuo, L. and Nayfeh, S. A., “Decentralized H2 Optimal Control with Regional PoleConstraints,” American Control Conference 2003, Denver, Colorado, 2003.
14. Varanasi, K. K., and Nayfeh, S. A., “Damping of Flexural Vibration by Low-Density Foamand Granular Materials,” ASME Design Engineering Technical Conference 2003, Chicago,
Illinois, 2003.
15. Zuo, L., and Nayfeh, S. A., “The Multi-Degree-of-Freedom Tuned-Mass Damper forSuppression of Single-Mode Vibration under Random and Harmonic Excitation,” ASME Design Engineering Technical Conference 2003, Chicago, Illinois, 2003.
16. Verdirame, J. M. and Nayfeh, S. A., “Design of Multi-Degree-of-Freedom Tuned-MassDampers using Perturbation Techniques,” 44th AIAA Structures, Structural Dynamics, and Materials Conference, Norfolk, Virginia, 2003.
17. Zuo, L. and Nayfeh, S. A., “Active Vibration Isolation Using a Post-Buckled Spring,” ASPE Spring Topical Meeting: Control of Precision Systems, Boston, Massachusetts, 2004.
18. Zuo, L. and Nayfeh, S. A., “Damping of Vibration in Belt-Driven Motion Systems Using aLayer of Low-Density Foam,” ASPE Spring Topical Meeting: Control of Precision Systems, Boston, Massachusetts, 2004.
19. Zuo, L., Slotine, J-J. S., and Nayfeh, S. A., “Experimental Study of a Novel AdaptiveController for Active Vibration Isolation,”, 2004 American Control Conference, Boston, Massachusetts, 2004.
20. Varanasi, K. K., Nayfeh, S. A., and Slocum, A. H., “Damping Flexure Mechanisms UsingLow-Density, Low-Wave-Speed Media,” ASME Design Engineering Technical Conference 2005, Long Beach, California, 2005.
21. Varanasi, K. K. and Nayfeh, S. A., “Vibration Damping Using Low-Wave-Speed Media: Complex Wavenumber and Energy Approximations,” ASME Design Engineering Technical Conference 2005, Long Beach, California, 2005.
22. Zuo, L. an Nayfeh, S. A., “Adaptive Feedforward Control with Saturation Nonlinearity,”ASME Design Engineering Technical Conference 2005, Long Beach, California, 2005.
23. Varanasi, K. K., Nayfeh, S. A., and Slocum, A. H., “Enhancing the Dynamics of FlexureMechanisms Using Low-Wave-Speed Media,” American Society for Precision Engineering Annual Meeting, Norfolk, Virginia, 2005.
24. Verdirame, J. M. and Nayfeh, S. A., “Vibration Damping in Cylindrical Shells usingLow-Density Granular Materials,” 47th AIAA Structures, Structural Dynamics, and Materials Conference, Newport, Rhode Island, 2006.
25. Ummethala, U., Hale, L. C., Clyne, J., Nayfeh, S. A., Williams, M. E., Di Regolo, J. A., van
Lievenoogen, A., and van Loo, J., “Linear Stage and Metrology Architecture for Reflective Electron Beam Lithography,” American Society for Precision Engineering Summer Topical Meeting, Berkeley, California, 2012.
26. Nayfeh, S. A. and Verdirame, J. M., “Design of Constraint Systems Based on the RayleighQuotient and Minimax Properties of Eigenvalues,” American Society for Precision Engineering Annual Meeting, Austin, Texas, 2015.
27. Verdirame, J. M., and Nayfeh, S. A., “Design of Constraint Systems for Rectangular PlatesBased on the Rayleigh Quotient and Minimax Properties of Eigenvalues,” American Society for Precision Engineering Spring Topical Meeting, Cambridge, Massachusetts, 2016.

Other Major Publications

1. Nayfeh, A. H., Nayfeh, S. A., Anderson, T. J., and Balachandran, B., “Transfer of Energyfrom High-Frequency to Low-Frequency Modes,” Nonlinearity and Chaos in Engineering Systems, edited by Thomson, J. M. T. and Bishop, S. R., Wiley Interscience, 1994.
2. Nayfeh, A. H., Nayfeh, S. A., and Pakdemirli, M., “On the Discretization of WeaklyNonlinear Spatially Continuous Systems,” Nonlinear Dynamics and Stochastic Mechanics, edited by Klienmann, W. and Namachchivaya, N. S., CRC Press, 1995.
3. Vallance, R., Kiani, S., and Nayfeh, S., “Open Design of Manufacturing Equipment,”Proceedings of CIRP First International Conference on Agile, Reconfigurable Manufacturing, Ann Arbor, Michigan, 2001.
4. Verdirame, J. M., Nayfeh, S. A., and Zuo, L., “Design of Multi-Degree-of-FreedomTuned-Mass-Dampers,” SPIE’s 9th Annual International Symposium on Smart Structures and Materials, San Diego, California, 2002.
5. Nayfeh, S. A., Verdirame, J. M., and Varanasi, K. K., “Damping of Flexural Vibration byCoupling to Low-Density Granular Materials,” SPIE’s 9th Annual International Symposium on Smart Structures and Materials, San Diego, California, 2002.
6. Trumper, D. L., Nayfeh, S. A., Lilienkamp, K. A., “Projects for Teaching Mechatronics atMIT,” Proceedings of the Eighth International Conference on Mechatronics, Enschede, The Netherlands, 2002.
7. Slocum, A. H., Basaran, M., Cortesi, R., and Nayfeh, S. A., “Get a Preload of This: Actuator and Bearing Technology is Changing How Grinding Machines Move,” American Machinist, December, 2002.
8. Nayfeh, S. A., Varanasi, K. K., and Verdirame, J. M., “Vibration Damping by
Low-Sound-Speed Material Layers” SPIE’s 10th Annual International Symposium on Smart Structures and Materials, San Diego, California, 2003.
9. Zuo, L. and Nayfeh, S. A., “Optimal Design of MDOF and Multiple SDOF Tuned-MassDampers for Wide-Band Vibration Suppression,” SPIE’s 10th Annual International Symposium on Smart Structures and Materials, San Diego, California, 2003.
10. Varanasi, K. K. and Nayfeh, S. A., “Damping in Belt-Driven Servomechanisms UsingLow-Density, Low-Wave-Speed Materials,” SPIE’s 11th Annual International Symposium on Smart Structures and Materials, San Diego, California, 2004.
11. Zuo, L., and Nayfeh, S. A., “An Integral Sliding Control for Robust Vibration Isolation andits Implementation,” SPIE’s 11th Annual International Symposium on Smart Structures and Materials, San Diego, California, 2004.
12. Varnasi, K. K. and Nayfeh, S. A., “Damping of Drive Resonances in Belt-Driven MotionSystems Using Low-Wave-Speed Media,” The Seventh International Conference on Motion and Vibration Control, St. Louis, Missouri, 2004.
13. Zuo, L. and Nayfeh, S. A., “Active-Passive Vibration Isolation and Position Control Using aPost-Buckled Spring,” The Seventh International Conference on Motion and Vibration Control, St. Louis, Misouri, 2004.
14. Zuo, L. and Nayfeh, S. A., “Modified LMS Feed-Forward Control for Vibration Isolationwith Actuator Limits,” SPIE’s 12th Annual International Symposium on Smart Structures and Materials, San Diego, California, 2005.
15. Verdirame, J. M. and Nayfeh, S. A., “Vibration Damping in Cylindrical Shells Filled WithLow-Density, Low-Wave-Speed Media,” SPIE’s 12th Annual International Symposium on Smart Structures and Materials, San Diego, California, 2005.

Selected Invited Lectures

1. “Some New Twists on the Dynamic Vibration Absorber,” October 2003, Department ofMechanical Engineering, Tufts University, Medford, Massachusetts
2. “Vibration Suppression by Dynamic Interaction with Low-Density, Low-Wave-SpeedMedia,” October 2003, Center for Acoustics and Vibration, The Pennsylvania State University, College Station, Pennsylvania.
3. “Some New Approaches to Vibration Suppression in Precision Machines,” October 2003,Department of Mechanical Engineering, University of Maryland, College Park, Maryland.
4. “Some New Approaches to Vibration Suppression in Precision Machines,” October 2003,National Institute of Standards and Technology, Gaithersburg, Maryland.
5. “Some New Twists on the Dynamic Vibration Absorber,” October 2003, CambridgeUniversity Mechanics Colloquium, Cambridge, England.
6. “Bias-Woven Structures,” March 2004, Mechanics Seminar, MIT Department of MechanicalEngineering, Cambridge, Massachusetts.
7. “Vibration Damping for Sound and Vibration Reduction,” July 2004, Ford Motor CompanyAdvanced Technology Center, Dearborn, Michigan.
8. “Vibration Damping in Precision Machines,” September 2004, Philips Research Center,Eindhoven, The Netherlands.
9. “Three-Dimensional Bias Weaving,” February 2005, Technical University of Eindhoven, TheNetherlands.

Doctoral Theses Supervised

1. Varanasi, Kripa, “Vibration Damping Using Low-Wave-Speed Media with Application toPrecision Machines,” February 2004.
2. Dever, Christopher, “Parameterized Maneuvers for Autonomous Vehicles,” August 2004
(reader).
3. Zuo, Lei, “Element and System Design for Active and Passive Vibration Isolation,” October2004.
4. Wilson, Andrew, “In-Situ Inspection of Optical Fiber Connections,” January 2006.
5. Verdirame, Justin, “Structural Vibration Damping Using Light-Weight Low-Wave-SpeedMedia,” January 2007.

Master’s Theses Supervised

1. Schiller, David, “Investigation of Methods of Compensating for Setting Problems of TaperedRoller Bearings in Dimensionally Unstable Bearing Housings,” May 1999.
2. Athanasopoulus, Andreas, “Design of Damped Toolholders for Increased CuttingPerformance,” May 2000.
3. Morfino, Paolo, “Damping of Torsional Vibration by Segmented Constrained-LayerDampers,” Dec 2000, visiting student from Turino.
4. Valdivia, Pablo, “Design, Analysis and Control of an Autonomous Conveyance Module forWell Exploration,” May 2001.
5. Wilson, Andrew “Design of an Automated Cutting Head for an On-Car Brake Lathe,” May 2001.
6. Varanasi, Kripa, “On the Design of a Precision Machine for Closed-Loop Performance,” Jan 2002.
7. Zuo, Lei, “Decentralized Control Techniques and Their Application to the Design of PassiveMechanical Systems,” Jan 2002.
8. Farzaneh, Nader, “Factors Affecting Galling Failures in Heavily Loaded Bushings,” May 2002.
9. Radighieri, Greg, “Design of a Tester to Study Galling Failures in Heavily LoadedBushings,” May 2002.
10. Verdirame, Justin, “Design of Multi-Degree-of-Freedom Tuned-Mass Dampers Based onPerturbation Techniques,” May 2002.
11. Mariappan, Dhanushkodi, “Dynamics of Belt-Driven Servomechanisms: Theory andExperiment,” May 2003.
12. Diaz, Mauricio, “Design of a Bias-Weaving Machine: Bias Thread Shifting,” September 2003.
13. Rohrs, Jonathan, “Design of a Bias-Weaving Machine: Thread Manipulation and OtherTopics,” Sept 2003.
14. Warmann, Emily, “Design of a Bias-Weaving Machine: Fill Insertion and Beat-Up,” Oct 2003.
15. Kelly, Darcy, “Design and Qualification of an Absolute Thickness Measurement Machine,” May 2004.
16. Akhampon, Sappinandana, “Control of a Bias-Weaving Machine,” Jan 2004.